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MACHINE

Single Polishing Machine

Step Polishing Machine

ANT-PL 550

Step Polishing Machine

Dedicated machine for polishing circular products with stepped surfaces. Capable of precision polishing Si, SiO₂, and SiC semiconductor materials with PC and NC SERVO controller-based precision control of T-axis position and load.

  • 01Work range Max Ø 600 — large-diameter stepped product support
  • 02T-Axis (Spindle) -45° ~ +30° — position and load adjustment
  • 03Work Table rotation Max 120 RPM — stable rotational polishing
  • 04PC and NC SERVO controller precision control
  • 05Si, SiO₂, SiC semiconductor material polishing capable
Max Ø 600Work Range
-45° ~ +30°T-Axis Angle
120 RPMTable Rotation
VACUUM Table (Option) — enhanced material holding stability
COMPATIBLE MATERIALS

Machinable Materials

Monocrystalline SiSiCSiO₂ (Quartz)AlNAlumina CeramicGraphiteSapphire
SPECIFICATIONS

Technical Specs

Standard specifications. Custom design and manufacturing available.

Work RangeMax Ø 600
T-Axis Angle-45° ~ +30°
Table RotationMax 120 RPM
Surface FinishRa < 1nm (mirror finish)
ControllerPC + NC SERVO
Surface TypesStep, incline, groove, flat
OptionVACUUM Table for enhanced holding

Interested in This Machine?

Contact us for technical specifications, machining test requests, or a custom quote.

TEL: +82-55-586-1331 | info@saehannanotech.com