A silicon electrode is a high-purity silicon part that sits inside the plasma chamber of a semiconductor etch tool. Showerhead electrodes, silicon cathodes and gas distribution plates are consumed continuously during the process, so for these consumable semiconductor parts consistent machining quality and reliable supply capability matter just as much as the part itself. Saehan Nanotech designs and builds, with its own engineering team, the machines needed to machine monocrystalline and polycrystalline silicon components.
Distributes process gas evenly across the wafer surface. A single plate carries several hundred to several thousand micro holes.
The electrode the wafer rests on. Flatness and thickness variation feed directly into process uniformity.
A plate-type silicon part that distributes gas flow, demanding precise hole position accuracy and straightness.
From ingot cutting through to micro hole drilling, Saehan Nanotech designs and builds every machine in the silicon electrode production chain in house — which means machine specifications and dedicated jigs can be kept consistent from one process step to the next.
The first step, cutting the silicon ingot into units matched to the length of the part to be produced.
The cut ingot is machined into discs — blanks — at electrode thickness. Two methods are available depending on production volume and material condition.
The decisive step in silicon electrode machining. Both spindles machine at the same time, so the workpiece is never flipped — which removes the position error and material damage that re-clamping introduces.
Ingot cutting, sawing and drilling — we develop every machine silicon electrode production needs ourselves. That lets machine specifications and dedicated jigs stay consistent across process steps.
Saehan Nanotech has been producing micro hole-machined silicon parts in house since 2020. We run a production line on our own machines, which means machining quality, productivity and long-run stability are verified on a real shop floor.
See our business areas →Process data and improvement points that emerge while producing parts go straight to our machine development team and feed into machine design. Because the team that builds the machines and the team that produces with them sit side by side, we can propose solutions that fit your actual production environment. Sample machining tests with your own material are available before you commit to a machine.
Product development, design, manufacturing, operator training and after-sales technical support are all carried out by our own staff. Overseas customers are supported to the same standard.
"Silicon parts" is the collective term for high-purity silicon components used inside the plasma chamber of a semiconductor etch tool. Among them, silicon electrodes are the upper electrode that injects process gas (the showerhead electrode) and the lower electrode the wafer rests on (the silicon cathode). Because they are consumed during processing, they are replaced periodically as semiconductor consumable parts.
The silicon ingot is first cut to unit length, then wire sawing produces discs (blanks) at electrode thickness, and finally the micro holes for gas injection are drilled. Saehan Nanotech builds every machine these steps require — ingot cutting, multi and single wire sawing, and Ø0.3–0.8 mm micro hole drilling — in house.
Silicon is hard and brittle at the same time, so chipping and micro-cracks form easily at the hole entry and exit during drilling. On top of that, position accuracy and straightness have to be held constant across several hundred to several thousand holes in a single plate. A both-sides drilling machine works with two spindles simultaneously and never flips the workpiece, which reduces the position error and damage that re-clamping causes.
Yes. Saehan Nanotech has been producing silicon hole-machined parts in house since 2020, so we can run sample machining tests on your own material. We then propose a machine configuration and dedicated jigs based on the test results.
Yes. Machine design, installation, training and after-sales technical support are all handled by our own engineering team, and overseas customers are supported to the same standard.
We custom-design machines and dedicated jigs around your material, part geometry and production method.
Get in touch about silicon electrode and silicon parts machining equipment, or about a fully custom build.
Our engineering team responds within 1 business day with a tailored proposal.